Pure metals and alloys sputtering targets |
Al: Aluminium Target | Mo: Molybdenum Target | Aluminium-Titanium Target: Al(60)Ti(40)at% | Magnesium-Yttrium Target: Mg(95)Y(5)wt% |
B: Boron Target | Nb: Niobium Target | Aluminium-Titanium Target: Al(67)Ti(33)at% | Magnesium-Zinc-Calcium Target: Mg(96.5)Zn(3)Ca(0.5)wt% |
Bi: Bismuth Target | Ni: Nickel Target | Aluminium-Silicon Target: Al(99)Si(1)wt% | Manganese-Aluminium Target: Mn(60)Al(40)at% |
Co: Cobalt Target | Sb: Antimony Target | Aluminium-Chromium Target: Al(50)Cr(50)at% | Molybdenum-Niobium Target: Mo(90)Nb(10)wt% |
Cr: Chromium Target | Sn: Tin Target | Aluminium-Chromium Target: Al(60)Cr(40)at% | Nickel-Indium Target: Ni(50)In(50)at% |
Cu: Copper Target | Sr: Strontium Target | Aluminium-Copper Target: Al(99.5)Cu(0.5)wt% | Nickel-Chromium Target: Ni(80)Cr(20)wt% |
Er: Erbium Target | Ta: Tantalum Target | Aluminium-Neodymium Target: Al(99)Nd(1)wt% | Nickel-Chromium Target: Ni(90)Cr(10)wt% |
Fe: Iron Target | Ti: Titanium Target | Chromium-Aluminium Target: Cr(60)Al(40)at% | Nickel-Iron Target: Ni(82)Fe(18)wt% |
Gd: Gadolinium Target | V: Vanadium Target | Cobalt-Iron Target: Co(50)Fe(50)wt% | Nickel-Vanadium Target: Ni(93)V(7)wt% |
Hf: Hafnium Target | W: Tungsten Target | Cobalt-Iron-Boron Target: Co(60)Fe(20)B(20)at% | Titanium-Niobium Target: Ti(52)Nb(48)wt% |
In: Indium Target | Y: Yttrium Target | Copper-Nickel Target: Cu(55)Ni(45)wt% | Titanium-Aluminium-Vanadium Target: Ti(90)Al(6)V(4)wt% |
Mg: Magnesium Target | Zr: Zirconium Target | Copper-Nickel Target: Cu(90)Ni(10)wt% | Titanium-Silicon Target: Ti(85)Si(15)at% |
Mn: Manganese Target | | Copper-Zirconium Target: Cu(50)Zr(50)at% | Titanium-Silver Target: Ti(95)Ag(5)wt% |
| | Copper-Nickel-Manganese Target: Cu(54)Ni(45)Mn(1)wt% | Tungsten-Copper Target: W(65)Cu(35)wt% |
| | Iron-Manganese Target: Fe(50)Mn(50)wt% | Tungsten-Titanium Target: W(70)Ti(30)at% |
| | Iron-Tin Target: Fe(50)Sn(50)at% | Tungsten-Titanium Target: W(90)Ti(10)wt% |
| | Iron-Boron-Cobalt Target: Fe(70)B(20)Co(10)at% | Zirconium-Aluminium Target: Zr(70)Al(30)at% |