High pure metal sputtering target |
Aluminum | Al | pellet,round,planar,rotatable target | 3N~6N |
Chronium | Cr | pellet,round,planar,rotatable target | 2N~3N5 |
Silver | Ag | pellet,round,planar,rotatable target | 4N~5N |
Platinum | Pt | pellet,round,planar,rotatable target | 4N~5N |
Gold | Au | pellet,round,planar,rotatable target | 4N~5N |
Nickel | Ni | pellet,round,planar,rotatable target | 4N~5N |
Tin | Sn | pellet,round,planar,rotatable target | 4N~6N |
Manganese | Mn | pellet,round,planar,rotatable target | 4N~5N |
Cobalt | Co | pellet,round,planar,rotatable target | 3N~4N |
Iron | Fe | pellet,round,planar,rotatable target | 3N~4N |
Zinc | Zn | pellet,round,planar,rotatable target | 4N~5N |
Zirconium | Zr | pellet,round,planar,rotatable target | 2N2~4N |
Titanium | Ti | pellet,round,planar,rotatable target | 4N~5N |
Indium | In | pellet,round,planar,rotatable target | 4N~5N |
Germanium | Ge | pellet,round,planar,rotatable target | 4N~6N |
Silicon | Si | pellet,round,planar,rotatable target | 4N~6N |
Copper | Cu | pellet,round,planar,rotatable target | 4N~5N |
Molybdenum | Mo | pellet,round,planar,rotatable target | 3N~4N |
Niobium | Nb | pellet,round,planar,rotatable target | 3N5 |
Tatalum | Ta | pellet,round,planar,rotatable target | 4N5 |
Tungsten | W | pellet,round,planar,rotatable target | 3N5 |
Hafnium | Hf | pellet,round,planar,rotatable target | 3N |
Vanadium | V | pellet,round,planar,rotatable target | 2N5~3N |